Tapping mode scanning capacitance microscopy: feasibility of quantitative capacitance measurement, Proceedings of SPIE | DeepDyve
deepdyve.com
Tapping mode scanning capacitance microscopy: feasibility of quantitative capacitance measurement, Proceedings of SPIE | DeepDyve
Tapping mode scanning capacitance microscopy is a new technique to study local capacitances. It is a combination of the tapping mode scanning force microscopy and the scanning capacitance microscopy. With the tapping motion of the tip, tip-sample distance is accurately regulated. In addition, topographic images are simultaneously obtained ...
Dec 16, 2014
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